Semiconductor Industry
Ultra-clean instrumentation for fab environments, gas delivery, DI water, and thermal processing.
Instrumentation Challenges
Measuring UPW flow and quality with zero contamination.
Precise mass flow control of specialty gases.
Maintaining ±0.1°C temperature stability in critical process areas.
Our Solutions
Baumer CombiFlow PF75H for ultra-pure water with wetted parts in PFA/PTFE.
Baumer FlexFlow T for process gas monitoring with IO-Link.
Jumo dTRANS T1000 transmitters with ±0.1°C accuracy for thermal zones.
Recommended Instruments
FFT-100
Thermal mass flow sensor for gas and compressed air measurement.
IR-CAS
High-speed infrared pyrometer for non-contact surface temperature measurement.
Our applications engineers have deep experience in semiconductor processes. Let us recommend the right instruments for your plant.
KR5000
High-channel-count paperless recorder for complex processes.
IR-FA
Fiber optic pyrometer for confined or high-EMF environments.
KP1000C
Advanced digital indicating controller with color display.
DICON-T
Universal process controller and signal conditioner with touch display.
S05
Compact piezoresistive pressure sensor for OEM integration.